Two (2) Pristine BOC Edwards HELIOS Scrubbers Available – Sold 6.18.2011

Update 6-20-2011: Both Units have been sold.  Dynaxa LLC has available a  two one (2 1) BOC Edwards Helios process abatement scrubbers that are is in excellent condition and ready for immediate shipment. (6-6-2011 update: One was just sold and has a new home in the great Mid West!)

The Helios (part of the BOC Edwards Atlas family of products) is a combination process gas abatement tool with an inwardly fired, natural gas oxidation section followed by a three stage wet scrubber.  The Helios unit is capable of handling 200  lpm of hydrogen in the effluent and up to 4 process inlets. 

They are well suited for:

  • Silicon Epitaxy
  • Silicon Germanium Epitaxy.   


These units already include WRU (Water Recirculation Unit) and Excess Air upgrades.

Photo’s below are of the one remaining unit.

Contact Dynaxa LLC at 203-300-5237 or

Edwards Used Helios Scrubber for Semiconductor processes

Helios Scrubber

1 Comment
  1. I would like to buy BOC Edwards HELIOS Scrubbers for 1set
    My company in taiwan,could you offer me the price and how to make the deal with you