Service Parts for Delatech (ATMI) CDO 863

Parts are available for the Delatech (ATMI, AMAT) CDO 863 units from BAZM Solutions.  www.bazmsolutions.com.

CDO 863 parts

See attached .pdf for most common parts.  Additional information for parts and service for all CDO models 858, 859 also available from Dynaxa LLC at www.DynaxaLLC.com/blog

1 Comment
  1. What is the hydrogen capacity for the CDO 858 or 862? I cannot find information on the web anywhere.