Installation of Post Pump Plasma Scrubbers for SF6

Dynaxa LLC’s Principal BAZM/GST has just completed installation of two (2) more Durian Plasma/Wet systems for SF6 abatement at an established US Semiconductor facility.  The Durian Point-of-Use, Post Pump scrubber uses a unique rotating arc plasma generator for high efficiency and long anode lifetime.  The systems are high volume production proven and enable customers to meet increasingly stringent SF6 abatement regulations.

  • Post Pump Plasma
  • SF6 abatement > 90%.
  • Idle Mode Compatible

Please give us a call to discuss at 203-300-5237

Abatement for SF6

Durian Plasma for SF6

Unique Rotating Arc Plasma

Unique Rotating Arc Plasma