Dynaxa LLC’s Principal BAZM/GST has just completed installation of two (2) more Durian Plasma/Wet systems for SF6 abatement at an established US Semiconductor facility. The Durian Point-of-Use, Post Pump scrubber uses a unique rotating arc plasma generator for high efficiency and long anode lifetime. The systems are high volume production proven and enable customers to meet increasingly stringent SF6 abatement regulations.
- Post Pump Plasma
- SF6 abatement > 90%.
- Idle Mode Compatible
Please give us a call to discuss at 203-300-5237
Durian Plasma for SF6
Unique Rotating Arc Plasma