Several Used Vector Si (Silane) Scrubbers Available

Dynaxa LLC is offering three different used Vector Si scrubbers.  These units are specifically designed for processes with silane such as Novellus SiN and PECVD.  One unit was designed for Intel.  The Model 6000 unit has three process inlets.  Picture below is of the Vector Si, single inlet unit.  These units are in very good to excellent condition.   Contact Dynaxa LLC at info@DynaxaLLC.com or at 203.300.5237.

Various ATMI Vector Si water scrubbers abatement

Vector Si Water Scrubber